Resist compounds including acid labile groups attached to polymeric chains at anhydride linkages
US7147986B2 · kind B2 · utility
0Cited by
3References
15Claims
0Family size
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Key dates
| Filing date | Mar 31, 2004 |
| Grant date | Dec 12, 2006 |
| Priority date | — |
| Expiry date | Apr 13, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0397
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A compound including a polymeric chain, and an acid labile group attached to the polymeric chain at an anhydride linkage is disclosed. Compositions including the compound, and methods of using the compositions are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.