Organometallic compound, its synthesis method, and solution raw material and metal-containing thin film containing the same
US7148367B2 · kind B2 · utility
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33Claims
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Key dates
| Filing date | Jan 23, 2004 |
| Grant date | Dec 12, 2006 |
| Priority date | — |
| Expiry date | Sep 24, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07F7/003
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The organometallic compound of the present invention is a compound that has bonds between metal atoms and nitrogen atoms or bonds between semimetal atoms and nitrogen atoms, and the content of chlorine in the compound is 200 ppm or less and the content of water is 30 ppm or less. In addition, the general formula of this compound is represented by the following formula (1):M[(R1)2N](n−s)(R2)s (1)
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.