Fabri-Perot filter
US7154094B2 · kind B2 · utility
2Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2004 |
| Grant date | Dec 26, 2006 |
| Priority date | — |
| Expiry date | Dec 9, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Fabri-Perot filter includes: a substrate; a first mirror disposed on the substrate; and a movable mirror unit facing the first mirror with a gap therebetween. The movable mirror unit is movable toward the first mirror in a case where a predetermined voltage is applied between the first mirror and the movable mirror unit so that the gap is changeable. The filter is capable of transmitting an infrared light having a predetermined wavelength corresponding to the gap. The movable mirror unit includes a center portion and a periphery portion, which is deformable easier than the center portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.