Control of fluid flow in the processing of an object with a fluid
US7163380B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 29, 2003 |
| Grant date | Jan 16, 2007 |
| Priority date | — |
| Expiry date | Aug 1, 2024 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B49/065
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An apparatus for and methods of control of a fluid flow. In a system for supercritical processing of an object, the apparatus includes a measuring device for measuring a pump performance parameter and a controller for adjusting a fluid flow in response to the performance parameter. The system further includes a processing chamber for performing a supercritical process and a device for circulating at least one of a gaseous, liquid, supercritical and near-supercritical fluid within the processing chamber. A method of control of a fluid flow includes the steps of: measuring a pump performance parameter; comparing a measured pump performance parameter to a predetermined target pump performance parameter; and adjusting a fluid flow in response to a difference in the measured pump performance parameter and the predetermined target pump performance parameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.