Actuator assembly and lithographic apparatus comprising such an actuator assembly
US7167234B2 · kind B2 · utility
2Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2004 |
| Grant date | Jan 23, 2007 |
| Priority date | — |
| Expiry date | Apr 8, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70758
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An actuator assembly includes a coil moveably positionable in a magnetic field generated by a magnet assembly, each of the coil and the magnet having substantially only one side facing the other. A magnetized field-shaping element is provided for shaping the magnetic field such that the magnetic field is substantially perpendicular to the direction of the electrical current for generating a force in a first degree of freedom. Thus, the coil may easily be mounted, since it does not need to be enclosed by magnet poles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.