Moving head, coating apparatus
US7169229B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2003 |
| Grant date | Jan 30, 2007 |
| Priority date | — |
| Expiry date | Mar 26, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C11/1015
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The invention pertains to a coating apparatus and method in which most of the relative movement between a dispensing head and the substrate to be coated is provided by the coating head. The moving head configuration reduces the system footprint and diminishes leveling problems. A powered shuttle mechanism carries a dispensing head above a substrate to be coated while riding on a bearing located underneath the chuck holding the substrate thereby providing rigidity and reducing the system footprint. Chuck support is designed to accommodate anticipated vertical sag in the dispensing head by supporting the chuck at points along its periphery thereby permitting the chuck to sag in conjunction with the dispensing head. The shuttle mechanism is equipped with means for automatically adjusting the height of the dispensing head with respect to substrate to compensate for substrate placement error, substrate dimensional variation, and mechanical drift in the mechanical machine parts. Coating consistency is enhanced using such height adjustment. A part of the apparatus containing the fluid delivery equipment and in communication with the dispensing head may be placed on a cart and removably at…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.