Reduction Smith-Talbot interferometer prism for micropatterning
US7170588B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Jul 23, 2004 |
| Grant date | Jan 30, 2007 |
| Priority date | — |
| Expiry date | Jul 23, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70408
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Reduction Talbot interference imaging is carried out using a glass or fused silica prism, where at least two surfaces within the prism allow for an increase in the propagating ray angles at the image plane compared to the object (the photomask) plane. Furthermore, by adding a second orthogonal pair of surfaces, X and Y order recombination is made possible thus allowing for the imaging in an orthogonal direction with a two-order interference scheme as well as repeating checkerboard (island and hole) patterns with a four-order interference scheme. A benefit of the invention is the reduced requirements of the photo mask, allowing for diffraction limited imaging with UV wavelengths in a media with index of unity (air) or larger (an immersion fluid). The prism interferometer is known as a Smith-Talbot prism lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.