Device and method for measuring position of liquid surface or melt in single-crystal-growing apparatus
US7172656B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 13, 2004 |
| Grant date | Feb 6, 2007 |
| Priority date | — |
| Expiry date | Jan 9, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1056
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In a device and a method for measuring the position of the liquid surface of a melt while a single crystal is being pulled, two measuring-lines are defined in an image of a fusion ring which is captured by means of a two-dimensional CCD camera, the intersections of the respective measuring lines and the fusion ring, on the opposite sides of the fusion ring, are detected, and the central position of the single crystal is calculated based on the intervals between the intersections on the opposite sides of the fusion ring, whereby the position of the liquid surface of the melt is determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.