Patent · US Expired

Cleaning method of treatment equipment and treatment equipment

US7172657B2 · kind B2 · utility

2Cited by
8References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 9, 2001
Grant dateFeb 6, 2007
Priority date—
Expiry dateJul 12, 2021

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C16/4405
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

In a state of the inside of a treatment chamber of treatment equipment being evacuated, therein a cleaning gas containing trifluoroaceticacid (TFA) as a cleaning agent is supplied. Metal such as copper used in the formation of an interconnection or an electrode and stuck on an inner wall surface of the treatment chamber, when coming into contact with the cleaning agent (TFA) in the cleaning gas, without forming an oxide or a metallic salt, is directly complexed. The complex is sublimed due to the evacuation and is exhausted outside the treatment chamber. Accordingly, at less labor and low cost, the cleaning can be efficiently implemented.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.