Normal incidence rotating compensator ellipsometer
US7173700B2 · kind B2 · utility
5Cited by
13References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 6, 2004 |
| Grant date | Feb 6, 2007 |
| Priority date | — |
| Expiry date | Jun 23, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A normal incidence rotating compensator ellipsometer includes an illumination source that produces a broadband probe beam. The probe beam is redirected by a beam splitter to be normally incident on a sample under test. Before reaching the sample, the probe beam is passed through a rotating compensator. The probe beam is reflected by the sample and passes through the rotating compensator a second time before reaching a detector. The detector converts the reflected probe beam into equivalent signals for analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.