David E. Aspnes
23Patents
16h-index
13Co-inventors
78Inventor score
Filing activity: Aug 29, 1975 → Dec 13, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5091320A | Ellipsometric control of material growth | Emerging Cross-Sectional Technologies | 171 | Expired |
| US5798837A | Thin film optical measurement system and method with calibrating ellipsometer | Physics | 154 | Expired |
| US5877859A | Broadband spectroscopic rotating compensator ellipsometer | Physics | 137 | Expired |
| US4931132A | Optical control of deposition of crystal monolayers | Chemistry; Metallurgy | 120 | Expired |
| US5900939A | Thin film optical measurement system and method with calibrating ellipsometer | Physics | 110 | Expired |
| US4357179A | Method for producing devices comprising high density amorphous silicon or germanium layers by low pressure CVD technique | Electricity | 81 | Expired |
| US4332833A | Method for optical monitoring in materials fabrication | Physics | 70 | Expired |
| US5973787A | Broadband spectroscopic rotating compensator ellipsometer | Physics | 68 | Expired |
| US3985447A | Measurement of thin films by polarized light | Physics | 67 | Expired |
| US6304326A | Thin film optical measurement system and method with calibrating ellipsometer | Physics | 47 | Expired |
| US5277747A | Extraction of spatially varying dielectric function from ellipsometric data | Physics | 37 | Expired |
| US6134012A | Broadband spectroscopic rotating compensator ellipsometer | Physics | 35 | Expired |
| US6411385B1 | Thin film optical measurement system and method with calibrating ellipsometer | Physics | 32 | Expired |
| US6181421A | Ellipsometer and polarimeter with zero-order plate compensator | Physics | 29 | Expired |
| US6320657A | Broadband spectroscopic rotating compensator ellipsometer | Physics | 28 | Expired |
| US4492466A | Cylindrical grating monochromator for synchrotron radiation | Physics | 25 | Expired |
| US6449043B2 | Broadband spectroscopic rotating compensator ellipsometer | Physics | 13 | Expired |
| US6831743B2 | Broadband spectroscopic rotating compensator ellipsometer | Physics | 7 | Expired |
| US4380490A | Method of preparing semiconductor surfaces | Electricity | 7 | Expired |
| US6650415B2 | Broadband spectroscopic rotating compensator ellipsometer | Physics | 7 | Expired |
| US7173700B2 | Normal incidence rotating compensator ellipsometer | Physics | 5 | Expired |
| US7355708B2 | Normal incidence rotating compensator ellipsometer | Physics | 2 | Active |
| US6411381B1 | Method of reducing noise generated by arc lamps in optical systems employing slits | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.