Inventor · Watchung, NJ, US

David E. Aspnes

23Patents
16h-index
13Co-inventors
78Inventor score

Filing activity: Aug 29, 1975 → Dec 13, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US5091320A Ellipsometric control of material growth Emerging Cross-Sectional Technologies 171 Expired
US5798837A Thin film optical measurement system and method with calibrating ellipsometer Physics 154 Expired
US5877859A Broadband spectroscopic rotating compensator ellipsometer Physics 137 Expired
US4931132A Optical control of deposition of crystal monolayers Chemistry; Metallurgy 120 Expired
US5900939A Thin film optical measurement system and method with calibrating ellipsometer Physics 110 Expired
US4357179A Method for producing devices comprising high density amorphous silicon or germanium layers by low pressure CVD technique Electricity 81 Expired
US4332833A Method for optical monitoring in materials fabrication Physics 70 Expired
US5973787A Broadband spectroscopic rotating compensator ellipsometer Physics 68 Expired
US3985447A Measurement of thin films by polarized light Physics 67 Expired
US6304326A Thin film optical measurement system and method with calibrating ellipsometer Physics 47 Expired
US5277747A Extraction of spatially varying dielectric function from ellipsometric data Physics 37 Expired
US6134012A Broadband spectroscopic rotating compensator ellipsometer Physics 35 Expired
US6411385B1 Thin film optical measurement system and method with calibrating ellipsometer Physics 32 Expired
US6181421A Ellipsometer and polarimeter with zero-order plate compensator Physics 29 Expired
US6320657A Broadband spectroscopic rotating compensator ellipsometer Physics 28 Expired
US4492466A Cylindrical grating monochromator for synchrotron radiation Physics 25 Expired
US6449043B2 Broadband spectroscopic rotating compensator ellipsometer Physics 13 Expired
US6831743B2 Broadband spectroscopic rotating compensator ellipsometer Physics 7 Expired
US4380490A Method of preparing semiconductor surfaces Electricity 7 Expired
US6650415B2 Broadband spectroscopic rotating compensator ellipsometer Physics 7 Expired
US7173700B2 Normal incidence rotating compensator ellipsometer Physics 5 Expired
US7355708B2 Normal incidence rotating compensator ellipsometer Physics 2 Active
US6411381B1 Method of reducing noise generated by arc lamps in optical systems employing slits Physics 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.