Monochromator mirror for the EUV-spectral range

US7173759B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Torsten Feigl · Jena, DE
• Norbert Kaiser · Markt Taschendorf, DE
• Thomas Kuhlmann · Jena, DE
• Sergey Yulin · Jena, DE

Key dates

• Filing date: Feb 21, 2003
• Grant date: Feb 6, 2007
• Expiry date: Oct 31, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B5/0891
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

The invention relates to a monochromator mirror for the EUV-spectral range, provided with a layer arrangement placed on a substrate, comprising a periodic sequence of two individual layers (A, B) made of different material forming a period having a thickness d in the form of a spacer-layer or an absorber-layer, whereby the reflectivity of the second or a higher Bragg-order is used. Said thickness d has a dimensional deviation of a maximum of 3% and the ratio of the layer thickness of the absorber-layer to the period thickness is smaller than the ratio of 0.8 of the used order of the Bragg-Reflexion.