Torsten Feigl
3Patents
2h-index
6Co-inventors
33Inventor score
Filing activity: Feb 21, 2003 → Aug 8, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7920323B2 | Thermally stable multilayer mirror for the EUV spectral region | Physics | 6 | Active |
| US7986455B2 | Thermally stable multilayer mirror for the EUV spectral range | Physics | 2 | Active |
| US7173759B2 | Monochromator mirror for the EUV-spectral range | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.