External volume insensitive flow verification
US7174263B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 2005 |
| Grant date | Feb 6, 2007 |
| Priority date | — |
| Expiry date | Mar 25, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F25/15
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow verifier for in-situ verification of a device under test (DUT), including an inlet connectable to a DUT, an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier, a vessel having a predetermined volume, diffusive media connecting the inlet to the vessel, an outlet valve connecting the vessel to the outlet for controlling flow from the vessel to the outlet, at least one temperature sensor operatively connected to the vessel for providing temperature measurements from within the vessel, and a pressure transducer operatively connected to the vessel for providing pressure measurements from within the vessel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.