Optical element, thin film structure, optical switch, and method of manufacturing optical element
US7177065B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2003 |
| Grant date | Feb 13, 2007 |
| Priority date | — |
| Expiry date | Oct 31, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical element which includes a reflection portion capable of reflecting a light beam in a desired direction is provided. The optical element comprises a substrate 21, a light reflection portion 101, and a support portion 102 which supports the light reflection portion 101 over the substrate 21. Each of the light reflection portion 101 and the support portion 102 is constructed of at least one film. The support portion 102 has one end 102c fixed to the substrate 21 and has the other end 102d joined with the film constructing the light reflection portion 101, and it bends from one end 102c toward the other end 102d, thereby to support the principal plane of the film constructing the light reflection portion 101, non-parallelly, for example, perpendicularly to the principal plane of the substrate 21.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.