Patent · US Expired

Process for producing a nanoelement arrangement, and nanoelement arrangement

US7183131B2 · kind B2 · utility

0Cited by

1References

19Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Eugen Unger · Augsburg, DE
Georg Dusberg · Munich, DE
Andrew C. Graham · Sunnyvale, US
Maik Liebau · Dresden, DE

Key dates

Filing date	Nov 12, 2003
Grant date	Feb 27, 2007
Priority date	—
Expiry date	Nov 12, 2023

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/891
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A process for producing a nanoelement arrangement and to a nanoelement arrangement. A first nanoelement is at least partially covered with catalyst material for catalyzing the growth of nanoelements. Furthermore, at least one second nanoelement is grown on the catalyst material.Also, a nanoelement arrangement having a first nanoelement on which at least one predetermined region is covered with catalyst material for catalyzing the growth of nanoelements, and at least one second nanoelement grown on the catalyst material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.