Wafer-level testing of optical and optoelectronic chips

US7184626B1 · kind B1 · utility

Assignee

• Luxtera, Inc. · US

Inventors

• Lawrence C. Gunn, III · Encinitas, US
• Roman Malendevich · Oceanside, US
• Thierry Pinguet · Cardiff-by-the-Sea, US
• Maxime Jean Rattier · Paris, FR
• Myles Sussman · San Mateo, US
• Jeremy Witzens · Aachen, DE

Key dates

• Filing date: Apr 7, 2004
• Grant date: Feb 27, 2007
• Expiry date: Jul 8, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/4224
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light from top of the wafer.