Complex microdevices and apparatus and methods for fabricating such devices
US7185542B2 · kind B2 · utility
10Cited by
13References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2002 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Dec 6, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB33Y10/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB™)
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.