Mover device and semiconductor manufacturing apparatus and method
US7187143B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 20, 2004 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Mar 11, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/15
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A mover device and an ion implanter apparatus having a processing base that reciprocates at a high speed without undesirable noise and vibration are provided. The mover device includes: a fixed base; a movable base that is linearly movable with respect to the fixed base; a processing base that is linearly movable with respect to the movable base; a main linear motor that generates a moving force to move the processing base with respect to the movable base, thereby moving the processing base with respect to the fixed base; and a velocity control unit that controls the moving velocity of the processing base with respect to the fixed base. In this mover device, the movable base is moved by virtue of a reaction force caused by the moving force to move the processing base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.