Wiring test structures for determining open and short circuits in semiconductor devices
US7187179B1 · kind B1 · utility
14Cited by
14References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2005 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Oct 19, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A wiring test structure includes a plurality of wiring traces configured in an interleaving spiral pattern. At least one of the plurality of wiring traces configured for open circuit testing therein, and at least a pair of the plurality of wiring traces is configured for short circuit testing therebetween.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.