Detection device

US7190451B2 · kind B2 · utility

Assignee

• LEICA MICROSYSTEMS CMS GMBH · DE

Inventors

• Volker Seyfried · Schallstadt, DE
• Bernd Widzgowski · Dossenheim, DE

Key dates

• Filing date: Jul 8, 2004
• Grant date: Mar 13, 2007
• Expiry date: Sep 2, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J3/0208
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A detection device includes a spectral splitting device located in a detection beam path for spectrally splitting detection light into individual spectral components. A deflection device is located downstream of the spectral splitting device for deflecting the individual spectral components in different deflection directions onto detectors assigned to the individual spectral components. At least one optical element is located in the detection beam path downstream of the spectral splitting device and upstream of the deflection device such that at least one of the individual spectral components incident on the deflection device is collimated.