Projection objectives including a plurality of mirrors with lenses ahead of mirror M3
US7190530B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2006 |
| Grant date | Mar 13, 2007 |
| Priority date | — |
| Expiry date | Feb 16, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
According to one exemplary embodiment, a projection objective is provided and includes at least two non-planar (curved) mirrors, wherein an axial distance between a next to last non-planar mirror and a last non-planar mirror, as defined along a light path, is greater than an axial distance between the last non-planar mirror and a first refracting surface of lenses following in the light path. In one exemplary embodiment, the first refracting surface is associated with a single pass type lens. The present objectives form images with numerical apertures of at least about 0.80 or higher, e.g., 0.95. Preferably, the objective does not include folding mirrors and there is no intermediate image between the two mirrors, as well as the pupil of the objective being free of obscuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.