Photoacid generators based on novel superacids
US7192686B2 · kind B2 · utility
6Cited by
2References
32Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 31, 2004 |
| Grant date | Mar 20, 2007 |
| Priority date | — |
| Expiry date | Mar 31, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/143
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Carborane based PAG's are bulky, produce a strong and large superacid, and have polarities that are compatible with the chemically amplified polymers typically used in photoresists. Carborane based PAG's also provide another broad class of bulky PAG's that may be used in photoresist formulations that offer flexibility in acid strength and polarity through changes in chemical structure. These PAG's may be used with EUV wavelengths, 157 nm, or 193 nm. Resolution and critical dimension control may be improved through the use of carborane based PAG's.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.