Transition metal alloys for use as a gate electrode and devices incorporating these alloys

US7193253B2 · kind B2 · utility

Assignee

• Intel Corporation · US

Inventors

• Mark L. Doczy · Beaverton, US
• Nathan E. Baxter · Arlington, US
• Robert S. Chau · Beaverton, US
• Kari Harkonen · Kauniainen, FI
• Teemu Lang · Helsinki, FI

Key dates

• Filing date: Aug 11, 2005
• Grant date: Mar 20, 2007
• Expiry date: Aug 11, 2025

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D30/0227
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

Embodiments of a transition metal alloy having an n-type or p-type work function that does not significantly shift at elevated temperature. The disclosed transition metal alloys may be used as, or form a part of, the gate electrode in a transistor. Methods of forming a gate electrode using these transition metal alloys are also disclosed.