Semiconductor component and a method for producing the same

US7193290B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Hubert Benzel · Neckartenzlingen, DE
• Heribert Weber · Leverkusen, DE
• Frank Schaefer · Lörrach, DE

Key dates

• Filing date: Jul 6, 2002
• Grant date: Mar 20, 2007
• Expiry date: Aug 23, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/121
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A semiconductor component, such as a humidity sensor, which has a semiconductor substrate, such as, for example, made of silicon, a first electrode and a second electrode and at least one first layer that is accessible for a medium acting from the outside on the semiconductor component, the first layer being arranged at least partially between the first and the second electrode. To reduce the costs for producing the semiconductor component the first layer has pores into which the medium reaches at least partially.