Adjustment arrangement of an optical element

US7193794B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Klaus Beck · Oberkochen, DE
• Bernhard Gellrich · Aalen, DE
• Hubert Holderer · Oberkochen, DE
• Thomas Petasch · Aalen, DE
• Cornelia Roesch · Oberkochen, DE
• Alexander Kohl · Aalen, DE

Key dates

• Filing date: Feb 13, 2004
• Grant date: Mar 20, 2007
• Expiry date: Apr 7, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).