Wavelength detecting apparatus, laser apparatus, and wavelength detecting method
US7196796B2 · kind B2 · utility
6Cited by
5References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 14, 2003 |
| Grant date | Mar 27, 2007 |
| Priority date | — |
| Expiry date | Jul 17, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0687
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a wavelength detecting apparatus using an etalon, a drift in wavelength measurement by the etalon is stabilized and an adverse influence of out gas is eliminated, so that correct wavelength measurement is realized. The wavelength detecting apparatus includes a housing equipped with a port for use of introducing replacement gas, an etalon set inside the housing, and a moisture-absorbing unit for absorbing at least moisture released inside the housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.