Patent · US Expired

Coating method

US7201942B2 · kind B2 · utility

8Cited by

15References

27Claims

0Family size

Assignee

Aixtron, Inc. · DE

Inventors

Holger Jurgensen · Aachen, DE
Johannes Käppeler · Harsewinkel, DE
Gerd Strauch · Aachen, DE
Dietmar Schmitz · Berlin, DE

Key dates

Filing date	Aug 9, 2002
Grant date	Apr 10, 2007
Priority date	—
Expiry date	Jun 28, 2023

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/45572
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A method for the production of coated substrates, such as OLEDs is disclosed, whereby at least one layer is deposited on the at least one substrate, by means of a condensation method and a solid and/or fluid precursor and, in particular, at least one sublimate source is used for at least one part of the reaction gases. The invention is characterized in that, by means of a temperature control of the reaction gases between precursor source(s) and substrate, a condensation of the reaction gases before the substrate(s) is avoided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.