Die storage tray having machined grooves and vacuum channels
US7207442B2 · kind B2 · utility
1Cited by
10References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 16, 2003 |
| Grant date | Apr 24, 2007 |
| Priority date | — |
| Expiry date | Mar 14, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49996
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A die holding tray useful for testing a plurality of individual dies placed into the holding tray together with a method of making the same. The holding tray has machined lateral and longitudinal sets of grooves with one set of grooves filled with strips in order to form pockets from the unfilled grooves. Vacuum channels are formed into the bottom of the pockets, and dies are held in place during testing by the flatness of the pocket bottoms and a drawn vacuum. Several embodiments are disclosed, including machining grooves in a compliant layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.