MEMS teeter-totter apparatus with curved beam and method of manufacture
US7210352B2 · kind B2 · utility
18Cited by
10References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 14, 2005 |
| Grant date | May 1, 2007 |
| Priority date | — |
| Expiry date | Jul 8, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A teeter-totter apparatus uses a curved beam to generate a differential output which may be indicative of an acceleration applied to the apparatus. The curved-beam teeter-totter apparatus can be combined with an x-axis and y-axis accelerometer, to produce a tri-axis accelerometer which is sensitive to an acceleration applied in any direction. Damping plates may be added to the accelerometers to reduce unwanted motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.