Using perfluoropoly-ethers to form pellicles
US7214452B2 · kind B2 · utility
3Cited by
7References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2002 |
| Grant date | May 8, 2007 |
| Priority date | — |
| Expiry date | Apr 26, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31544
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Exposure systems may use pellicles made of perfluoropoly-ether. These materials may exhibit reduced darkening upon repeated exposures compared to other materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.