Mechanism to prevent actuation charging in microelectromechanical actuators
US7214995B2 · kind B2 · utility
8Cited by
0References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2004 |
| Grant date | May 8, 2007 |
| Priority date | — |
| Expiry date | Jul 26, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0018
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a top movable electrode, and an actutaion electrode with an undoped polysilicon stopper region to contact the top movable electrode when an actuation current is applied. The undoped polysilicon stopper region prevents actuation charging that accumulates over time in a unipolar actuation condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.