Micromirror devices with in-plane deformable hinge
US7215459B2 · kind B2 · utility
41Cited by
6References
68Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2005 |
| Grant date | May 8, 2007 |
| Priority date | — |
| Expiry date | Nov 2, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.