Microelectromechanical apparatus and methods for surface acoustic wave switching
US7218188B2 · kind B2 · utility
9Cited by
12References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 18, 2005 |
| Grant date | May 15, 2007 |
| Priority date | — |
| Expiry date | Jul 3, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/6403
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.