Yttria-coated ceramic components of semiconductor material processing apparatuses and methods of manufacturing the components
US7220497B2 · kind B2 · utility
30Cited by
3References
11Claims
0Family size
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Key dates
| Filing date | Dec 18, 2003 |
| Grant date | May 22, 2007 |
| Priority date | — |
| Expiry date | Jul 9, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32477
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Yttria-coated ceramic components of semiconductor material processing apparatuses include a substrate and at least one yttria-containing coating on the substrate. The components are made by applying a first yttria-containing coating on a ceramic substrate, which can be a green body of the ceramic material. The coated green body is sintered. The first yttria-containing coating can be treated to remove attached yttria particles resulting from the sintering. In another embodiment, a second yttria-containing coating can be thermally sprayed on the first yttria-containing coating to cover the particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.