Cooling micro-channels
US7227257B2 · kind B2 · utility
10Cited by
8References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2002 |
| Grant date | Jun 5, 2007 |
| Priority date | — |
| Expiry date | Apr 1, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates generally to microelectronic technology, and more specifically, to an apparatus used for the cooling of active electronic devices utilizing micro-channels or micro-trenches, and a technique for fabricating the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.