Surface inspection apparatus
US7227649B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 16, 2005 |
| Grant date | Jun 5, 2007 |
| Priority date | — |
| Expiry date | Nov 29, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/0641
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspection apparatus (100) comprises a light (10) source for emitting a light beam L0, an optical illumination system (30) for projecting the light beam on an inspected surface (220) formed by a film 210, an optical detection system (50) having lenses to spatially split reflection lights and an aperture stop (60) having apertures disposed with polarization elements (61–64) for transilluminating mutually different polarized light components, a light intensity detection device (41–44) for individually detecting the light intensities of the respective reflection lights passed through the respective polarization elements, a scanning device (20), and an arithmetic processing device (70) for detecting the polarization conditions of the respective reflection lights and obtaining a film thickness of the film and at least one of the physical properties of the film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.