Air gaps for optical applications
US7227678B2 · kind B2 · utility
2Cited by
13References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2002 |
| Grant date | Jun 5, 2007 |
| Priority date | — |
| Expiry date | Aug 21, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/1213
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical structure includes a substrate having two side surfaces. A first layer of high refractive index material is formed on the substrate. A sacrificial layer is formed on the first layer. A second layer of high refractive index material is formed on the sacrificial layer. At a predefined temperature the sacrificial layer is evaporated, thus forming an air gap between the first layer and the second layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.