Inventor · Concord, MA, US

Lionel C. Kimerling

91Patents
24h-index
100Co-inventors
91Inventor score

Filing activity: May 23, 1977 → Nov 9, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US5841931A Methods of forming polycrystalline semiconductor waveguides for optoelectronic integrated circuits, and devices formed thereby Physics 157 Expired
US6635110B1 Cyclic thermal anneal for dislocation reduction Electricity 119 Expired
US4234358A Patterned epitaxial regrowth using overlapping pulsed irradiation Emerging Cross-Sectional Technologies 107 Expired
US6812495B2 Ge photodetectors Emerging Cross-Sectional Technologies 102 Expired
US6352942B1 Oxidation of silicon on germanium Electricity 95 Expired
US5107538A Optical waveguide system comprising a rare-earth Si-based optical device Electricity 75 Expired
US6108464A Optoelectronic integrated circuits formed of polycrystalline semiconductor waveguide Physics 69 Expired
US8160404B2 High speed and low loss GeSi/Si electro-absorption light modulator and method of fabrication using selective growth Emerging Cross-Sectional Technologies 50 Active
US7305157B2 Vertically-integrated waveguide photodetector apparatus and related coupling methods Physics 50 Expired
US4266986A Passivation of defects in laser annealed semiconductors Emerging Cross-Sectional Technologies 49 Expired
US6631225B2 Mode coupler between low index difference waveguide and high index difference waveguide Physics 45 Expired
US6690871B2 Graded index waveguide Physics 40 Expired
US7831123B2 Microphotonic waveguide including core/cladding interface layer Physics 38 Active
US6621972B2 Optical waveguides with trench structures Physics 38 Expired
US7266263B2 Integrated waveguide photodetector apparatus with matching propagation constants and related coupling methods Emerging Cross-Sectional Technologies 37 Expired
US6697551B2 Mode transformer between low index difference waveguide and high index difference waveguide Physics 36 Expired
US7482532B2 Light trapping in thin film solar cells using textured photonic crystal Emerging Cross-Sectional Technologies 35 Active
US6850683B2 Low-loss waveguide and method of making same Physics 33 Expired
US7321713B2 Silicon based on-chip photonic band gap cladding waveguide Physics 33 Expired
US6751368B2 Methods of altering the resonance of waveguide micro-resonators Physics 28 Expired
US6946318B2 Method of forming GE photodetectors Emerging Cross-Sectional Technologies 27 Expired
US7596158B2 Method and structure of germanium laser on silicon Electricity 27 Active
US6627923B1 Resonant microcavities Electricity 26 Expired
US6624945B2 Thin film filters using omnidirectional reflectors Physics 24 Expired
US9046650B2 Methods and apparatus for mid-infrared sensing Physics 24 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.