Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component
US7229694B2 · kind B2 · utility
0Cited by
5References
12Claims
0Family size
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Key dates
| Filing date | May 27, 2003 |
| Grant date | Jun 12, 2007 |
| Priority date | — |
| Expiry date | May 27, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31663
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A micromechanical component includes an anti-adhesive layer, formed from at least one fluorine-containing silane, applied to at least parts of its surface for reducing surface forces. To increase mechanical and thermal load capacity, the anti-adhesive layer is provided as a multilayer coating which is formed from at least one metal oxide layer and at least one layer composed of at least one fluorine-containing silane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.