Non-contact mobile charge measurement with leakage band-bending and dipole correction
US7230443B1 · kind B1 · utility
4Cited by
11References
22Claims
0Family size
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Key dates
| Filing date | Aug 23, 2005 |
| Grant date | Jun 12, 2007 |
| Priority date | — |
| Expiry date | Aug 23, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2648
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Corona charges are used to bias a wafer to push down mobile charges and then pull them up during temperature cycles. Mobile charge is measured from the drops in the corona voltage due to the mobile charges. Corrections are made in the measurements for dipole potentials, leakage and silicon band-bending.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.