Semiconductor device
US7233077B2 · kind B2 · utility
2Cited by
1References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 17, 2003 |
| Grant date | Jun 19, 2007 |
| Priority date | — |
| Expiry date | Jan 26, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor device includes a substrate which has a main surface and an alignment mark which is formed on the main surface and which has a pattern, wherein the pattern in a plane view has a shape that is obtained by eliminating corners from a polygon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.