Patent · US Expired

Fast swapping station for wafer transport

US7234913B2 · kind B2 · utility

17Cited by

6References

35Claims

0Family size

Assignee

Integrated Dynamics Engineering GmbH · DE

Inventors

Peter Heiland · Dover, US
Ralf Tillmann · Mannheim, DE

Key dates

Filing date	Mar 26, 2004
Grant date	Jun 26, 2007
Priority date	—
Expiry date	Aug 13, 2024

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/141
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An apparatus for accepting and transferring at least one disk-like member is provided. The apparatus includes a pick- and place-mechanism including gripping means. In effect, the mechanism is adapted to provide pick- and/or place-cycles, which during operation provides a movement of said gripping means between an up and a down position and vice versa, whereby, in the down position, said gripping means either picks the disk-like member from a load position or places the disk-like member onto the load position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.