Wafer edge with light sensor
US7235806B2 · kind B2 · utility
4Cited by
34References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 2003 |
| Grant date | Jun 26, 2007 |
| Priority date | — |
| Expiry date | May 16, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67259
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for detecting the presence of a substrate that is carried by an end effector of a substrate handling assembly positioned within a substrate processing system comprises a receiving member that is coupled to an end effector and a light sensor that is operatively coupled to the receiving member and is configured to detect an amount light transmitted by the receiving member. In a modified embodiment, the apparatus also includes a transmitting member that receives light from a light source and is also coupled to the end effector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.