Probe device and probe method
US7235984B2 · kind B2 · utility
5Cited by
6References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 12, 2002 |
| Grant date | Jun 26, 2007 |
| Priority date | — |
| Expiry date | May 8, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe device 20 having a contact load monitoring device 10. This contact load monitoring device measures the displacement of a loading table caused by a contact load exerted on the mounting table from a probe in an overdrive by means of a displacement sensor 11 disposed in the space below the mounting table as a sinkage quantity. This sinkage quantity is collated with a correlation table to determine the contact load. If the contact load is less than the designed contact load, the mounting table is further overdriven.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.