Inductor-based MEMS microphone
US7239712B1 · kind B1 · utility
4Cited by
1References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2004 |
| Grant date | Jul 3, 2007 |
| Priority date | — |
| Expiry date | Oct 28, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R19/04
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An inductor-based integrated MEMS microphone and a method of making the microphone is provided. The microphone structure includes a vibrating inductor that is suspended over another stationary inductor such that the magnetic field induced from one inductor induces an electrical potential across the other. The stationary inductor is embedded in a dielectric material that is etched out over the stationary inductor to provide the cavity over which the vibrating inductor is suspended.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.