System and method for delivering writing data of a semiconductor device and fabricating a semiconductor device
US7239934B2 · kind B2 · utility
3Cited by
11References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2004 |
| Grant date | Jul 3, 2007 |
| Priority date | — |
| Expiry date | Jul 20, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3174
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A design system for delivering data via a network to a plant, which fabricates a semiconductor device by direct writing, includes: a data conversion unit generating the data specified by a product name of the semiconductor device, a layer name, and a machine type of an electron beam lithography system for the direct writing; a central memory unit recording the data; and a plant mediator distributing the data to the plant via the network, and re-distributing the data to the plant in response to a download request associated with the product name, the layer name, and the machine type.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.