Inventor · Yokohama, JP

Takema Ito

4Patents
3h-index
7Co-inventors
36Inventor score

Filing activity: Jul 29, 2004 → Aug 16, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US7260443B2 System and program for making recipe and method for manufacturing products by using recipe Emerging Cross-Sectional Technologies 13 Expired
US7239934B2 System and method for delivering writing data of a semiconductor device and fabricating a semiconductor device Electricity 3 Expired
US7512501B2 Defect inspecting apparatus for semiconductor wafer Physics 3 Active
US7847270B2 Semiconductor manufacturing apparatus and method thereof Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.