System and method for post-fabrication reduction of minimum feature size spacing of microcomponents
US7240420B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2001 |
| Grant date | Jul 10, 2007 |
| Priority date | — |
| Expiry date | Dec 30, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/5313
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A system and method are disclosed which enable post-fabrication reduction of minimum feature size spacing of microcomponents. A method for producing an assembly of microcomponents is provided, in which at least two microcomponents are fabricated having a separation space therebetween. At least one of the microcomponents includes an extension part that is operable to reduce the separation space. Such an extension part may include an extension member that is movably extendable away from its associated microcomponent to reduce the separation space between its associated microcomponent and another microcomponent. The extension part may be latched at a desired position by a latching mechanism. The extension part may be implemented such that the extension member eliminates the separation space, thereby resulting in such extension member engaging another microcomponent. Such engagement may be achieved without requiring power to be applied to the microcomponents. Certain embodiments are insensitive to etching inaccuracy encountered during fabrication.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.