Micromechanical component having a sealed cavity and at least two dielectric layers and corresponding method for its manufacture
US7243551B2 · kind B2 · utility
3Cited by
11References
11Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 21, 2004 |
| Grant date | Jul 17, 2007 |
| Priority date | — |
| Expiry date | Dec 21, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0315
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromechanical component having a substrate, a cavity formed in the substrate, a membrane provided on the surface of the substrate, which seals the cavity, the membrane having at least two layers between which one or several piezoelectric or piezoresistive circuit trace strip(s) is/are embedded, and a corresponding manufacturing method therefor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.